Abstract
Most of the miniaturized electromagnetic vibrational energy harvesters (EVEHs) are based on oscillating proof mass suspended by several springs or a cantilever structure. Such structural feature limits the miniaturization of the device’s footprint. This paper presents an EVEH device based on a torsional vibrating magnet over a stack of flexible planar coils. The torsional movement of the magnet is enabled by microfabricated silicon torsional springs, which effectively reduce the footprint of the device. With a size of 1 cm × 1 cm × 1.08 cm, the proposed EVEH is capable of generating an open-circuit peak-to-peak voltage of 169 mV and a power of 6.9 μW, under a sinusoidal excitation of ±0.5 g (g = 9.8 m/s2) and frequency of 96 Hz. At elevated acceleration levels, the maximum peak-to-peak output voltage is 222 mV under the acceleration of 7 g (±3.5 g).
Highlights
Oscillating Magnet.Vibration energy harvesters (VEHs) are devices that transduce vibration kinetic energy to electric power [1]
The vibration energy harvesters can be implemented with different operation principles, such as piezoelectric [3], electromagnetic [4], electrostatic [5], and triboelectric [6]
The transduction of the electromagnetic vibration energy harvesters (EVEHs) is often realized by vibration-induced movement between a permanent magnet and a set of solenoid coils
Summary
Electromagnetic vibration energy harvesters (EVEHs) have the advantage of easy design and fabrication, relatively high output voltage and power, as well as good reliability [7]. Toward the goal of miniaturization, the fabrication of the vibrating proof mass has been shifted from PCB to MEMS technologies in a previous study [20] In these designs, the permanent magnet is suspended by four folded springs, which is a classic type of layout for reducing the resonant frequency of MEMS structures (in addition to cantilever structures). We will extend our conference contributions in [21] and systematically present the design, implementation, and results of a torsional EVEH device
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