Vibration characteristics of the rotary table of large spin coater and its influencing factors

Abstract

The rotary table vibration of the spin coater directly impacts the quality of the spin coating film. In view of the unclear vibration characteristics of the rotary table during operation, the rotary table vibration characteristics and its influencing factors considering the spindle system are studied. Based on the elastic contact theory and multi-body system theory, the rotary table vibration characteristics of the rotary table when the parts of the rotary table are flexible are analyzed by establishing the rotary table multi-rigid body and flexible coupling dynamics models, respectively. By comparing with the rotary table vibration measurement results, it is found that the flexible treatment of the load tray is more consistent with the actual vibration characteristics. The study further analyzes the effects of the unbalance of the rotary table, the rotary table speed, the coaxiality of the load tray and the spindle, and the perpendicularity of the load tray and the spindle on the vibration characteristics. The results show that the influence of the spin coater rotary table under the actual working conditions is from the highest to the lowest degree of influence on the unbalance of the load tray, the coaxiality of the load tray and the spindle, the perpendicularity of load tray and the spindle, and the rotational speed of the rotary table. This study provides a reliable theoretical and experimental basis for the vibration characteristics analysis and structural design of the spin coater rotary table.