Vibration analysis of stator of ultrasonic motor by using finite element method.

Abstract

A finite element program is developed for analyzing vibration of piezoelectric structures. The validity of the program is confirmed by comparing the computed results with those of an experiment conducted on a piezoelectric unimorph cantilever beam. The vibration analysis of the stator of an ultrasonic motor is carried out by employing the program, and the frequency response, the characteristics of the travelling wave, and the trajectory of a particle on the surface of the stator are computed. It is shown that the surface shape of the stator plays an important role in the efficiency of an ultrasonic motor.