Abstract
Very low loss multimode polymeric optical waveguides were fabricated on a 4 inch silicon substrate. Deuterated poly-methylmethacrylate was used as the core and UV curable epoxy resin as the cladding. The propagation losses of the waveguides were < 0.02 dB/cm at both 0.68 and 0.83 µm, and 0.07 dB/cm at 1.31 µm.
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