Abstract
A new technique is presented to make vertically coupled semiconductor microring resonators that eases the fabrication process with devices more robust to ring-to-waveguide misalignments. Single-mode microring optical channel dropping filters are demonstrated for the first time in this configuration with Qs greater than 3000 and an on-resonance channel extinction greater than 12 dB. A 1/spl times/4 multiplexer/demultiplexer crossbar array with second-order microrings was also made and exhibited channel-to-channel crosstalk lower than 10 dB.
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