Vertically Aligned Carbon Nanotubes Transfer with Glass Frit

Abstract

Nanogetters, based on carbon nanotubes (CNTs) coated Ti films, do have higher pumping speed and possibly larger sorbed quantity compared with traditional getters, such as St175 of SAES [1]. Although the nanogetter is with the outstanding performance, it is still hard to be integrated into micro electro mechanical systems (MEMS) packaging and devices due to high growth temperature of CNTs (>700°C) [2], poor adhesion with substrate [3, 4], vulnerability to pollute the wafers and difficulty to pattern. Therefore, this paper proposes a promotion of nanogetter based on transferring out vertically aligned CNTs (VA-CNTs) utilizing the glass frit. Compared with the conventional nanogetters, the promotion processes have advantages of (1) compatibility to the MEMS materials with controllable melting temperature and coefficient of thermal expansion (CTE), (2) Enhancement of the adhesion between CNTs and substrate, (3) Avoiding polluting the package wafer during CNTs growth. The results indicate that the promotion processes can be fulfilled by the silicon wafers and have wide applications such as nanogetters, field emission display, etc.