Abstract
A vertical-membrane optical-fiber pressure sensor has been developed on (110) silicon using an anisotropic etching process. The sensor consists of a vertical deflectable membrane that is one wall of the measuring cavity and a channel for the optical fiber. Membranes as thin as 4 μm have been fabricated. The cavity is anodically sealed with a Pyrex glass cap. A single-mode fiber is inserted in the channel. The alignment between the fiber and the maximum deflectable region of the membrane is realized by a proper microfabricating process. Interference patterns obtained are clear and stable ‘Newton's rings’. A plot showing the overall intensity of the interference pattern as a function of the pressure applied to the sensor is presented. The minimum detectable signal from the optical detector for the 4 μm thick measuring membrane is 1 μV, which corresponds to a minimum detectable pressure of about 5 Pa.
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