Verification of MEMS fabrication process for the application of MEMS solid propellant thruster arrays in space through launch and on-orbit environment tests

Abstract

One of the most significant barriers encountered to the space application of MEMS technology is its lack of reliability and flight heritage in space environments. In this study a MEMS solid propellant thruster array was selected for the verification test of MEMS technology in space. The function and performance of MEMS solid thruster have been previously verified by laboratory-level research in universities. To ensure the successful operation of the MEMS thruster module before flight demonstration on-orbit, launch and on-orbit environment tests were performed at the qualification level. In the launch test, sine burst, and random vibration loads were applied to the MEMS thruster module. The thermal vacuum tests were carried out for the on-orbit environment test. As a result of the launch vibration test and on-orbit environment test, the variations of the characteristics were less than 0.7%, and all the functional requirements were successfully verified after the vibration tests. The tests successfully verified the manufacturing process because the thruster module showed stable normal function before the ignition. The test result outputs will be helpful in establishing MEMS fabrication guidelines for space applications.