Abstract
Near-field evanescent wave coupling of various subwavelength grating pairs, using a 1.55 μm infrared semiconductor laser has been demonstrated for use as an optical MEMS sensor. Subwavelength grating pairs were fabricated on both glass and silicon substrates. When coupled together the effective grating period is not subwavelength and can exhibit several diffraction orders. The 1.55 μm infrared source was incident on the coupled pairs and the first-order output intensity was recorded and compared with the output intensity from simulated results. This demonstrated evanescent wave coupling concept can be applied to MEMS systems with nanometer gap separations (e.g., pressure sensors, biosensors, and accelerometers) to allow for subnanometer displacement detection.
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