Abstract
Optical emission of the ablated particles in pulsed laser deposition of NiO films was measured dynamically. The emission spectra showed species of the ablated particles. There are three types of light emitting particles, that is, the laser induced plasma near the target, two groups of the depositing ionized particles or the neutrals. The streak photography displayed their kinetic motions. Velocities of the ionized particles were almost proportional to the square root of the incident laser fluence ranging from 5 to 150 J cm −2. It is possible to control the kinetic energy of particles incident onto a substrate by adjusting the laser fluence.
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