Abstract

An iterative optimization-based synthesis algorithm has been presented for the design of diffractive micro-optical elements (DMOE's) with subwavelength structures as beam controllers. The DMOE's with subwavelength structures only require single step fabrication, but the subwavelength and aperiodic nature of the DMOE's prevent the use of scalar diffraction theory and the use of coupled-wave theory. We apply the finite-difference time-domain (FDTD) method as the vector model and the iterative plane wave spectrum algorithm (IPWS) as the synthesis algorithm, which can make the design of DMOE's in reasonable time frames. The IPWS, the FDTD method, the plane wave spectrum propagation method have been discussed and a beam deflector with subwavelength structures has been designed.

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