Abstract
We have been researching efficient generation of multi-charged ions on electron cyclotron resonance ion source (ECRIS). We can introduce microwaves from a coaxial antenna at the upstream side of the magnetic mirror field (Coaxial) and a rod antenna at the downstream side (Rod). Regardless of R-wave cutoff, ECR occurs at two resonance points by Dual-ECR heating which means introducing microwaves from both antennas and we succeeded in generating more multi-charged Ar ions. We measured beam currents and plasma parameters such as electron density and electron temperature and obtained their radial distributions. We found the beam currents of multi-charged Ar ions were highest by Dual-ECR heating.
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