Abstract

This article details the design, simulation, fabrication, and testing of four variations of micromachined vibration isolators. The vibration isolators serve as low-pass filters to attenuate high-frequency (>2 kHz) mechanical excitation in order to improve both microelectromechanical system (MEMS) sensor fidelity and lifespan. Isolators are designed for integration with a small (~3 mm $\times$ ~3 mm) MEMS sensor package and boast a sub-1-cm2 footprint (7 mm $\times$ 7 mm). For all isolator variations, the fundamental geometry consists of an outer frame to be fixed to the substrate of interest, a central platform to accommodate the isolated sensor, and springs for the attachment of the frame and platform. We fabricate devices via a simple, double-sided lithography process using $\langle 100\rangle $ silicon-on-insulator (SOI) wafers. We then performed laser Doppler vibrometry to investigate the frequency response of each isolator variation across a 6.2-kHz bandwidth. Dependent upon geometry, isolator variations exhibit resonant frequencies from 1.3 to 2 kHz with quality factors ( $Q$ ’s) ranging from 16.7 to 60.

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