Abstract
TiO 2 films were produced by low-temperature reactive magnetron sputtering and characterized by X-ray diffraction, atomic force microscopy, scanning electron microscopy, electrochemistry, and mechanical-indentation techniques. The TiO 2 films consisted of 20-30 nm particles. Electrochemical Li-insertion experiments revealed that the Li diffusion along grain boundaries was much faster compared to the diffusion into the TiO 2 grains. The mechanical properties of the films changed drastically after electrochemical Li insertion; the microhardness increase of the Li-inserted TiO 2 samples was in the range 70-104% with maximum values ranging between 5.8 and 6.5 GPa. Hardness measurements on a Li-extracted sample showed that the changes in mechanical properties were irreversible.
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