Abstract
To obtain milliampere-class megaelectronvolt ion beams for ion implantation, a variable energy r.f. quadrupole (RFQ) system driven by an LC resonance circuit has been studied. A newly designed LC circuit consists of a set of RFQ electrodes (about 2.3 m in length) and a one-turn cylindrical coil, whose inductance can be discretely varied by the change of its total length or cross-sectional area. The variable range of the resonant frequency was 9.64–38.6 MHz, corresponding to an energy variation of a factor of 16. Acceleration experiments showed that the intervane voltage was over 70 kV, with an r.f. power of 44 kW and an operation frequency of 15.3 MHz; under these conditions, 31P+ ions were accelerated to 1.06 MeV. Experiments further demonstrated that ions could be effectively accelerated at different operation frequencies with the same RFQ electrodes set.
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