Abstract
In this paper we present the impact of variability, a surface source parameter, on the efficiency evaluation of surface contamination monitors. This study was based on two source uniformity correction methodologies and data from real surface source distributions. Surface source intensity distribution has been changed by rearranging the cells (portions of the active area of each LARS) while keeping the same source uniformity value. Instrument efficiencies have been calculated for different sets of uniformities and variabilities. This study led to emphasize the importance of variability, a differential source intensity distribution parameter, over the uniformity, an integral source intensity distribution parameter, and reinforced the importance of the source uniformity correction procedure on the course of surface contamination monitor calibration.
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