Abstract
Vapor pressures of three metalorganic precursors, dimethylcadmium (CAS RN: 506-82-1), trimethylbismuth (CAS RN: 593-91-9), and tris(dimethylamino)antimony (CAS RN: 7289-92-1) were measured using the static method in the technologically important temperature range from 258 to 323K. The experimental data were fitted with the Clarke and Glew as well as the Antoine equation. The enthalpies of sublimation and vaporization were derived from the temperature dependence of vapor pressure. To our knowledge, this the first time that the vapor pressure measurements for tris(dimethylamino)antimony and crystalline dimethylcadmium are reported. For liquid dimethylcadmium and trimethylbismuth, newly obtained vapor pressure data reconcile contradictory data sets reported in the literature.
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