Abstract
Chlorosilane-based self-assembled monolayers (SAMs), including octyltrichlorosilane (C8-OTS), (tridecafluoro-1,1,2,2-tetrahydrooctyl) trichlorosilane (FOTS) and dimethyldichlorosilane (DDMS), are applied on various substrates via a vapor-phase coating process for thermal stability analysis. Si(100) wafer dies and commercial vapor-phase-deposited nanoparticle films are utilized as substrates to characterize the thermal stability enhancement. Atomic-force microscopy data prove that the vapor-based deposition technique results in a smooth surface with few aggregates. Contact angle goniometry data show that DDMS-based SAMs function effectively as the final protection layer for various substrates and these results are confirmed by thermogravimetric analysis of SAMs on the fumed silica supports. Quantitative analysis from X-ray photoelectron spectroscopy data shows that polymerized DDMS may exist on various surfaces and can contribute to the stable silane structures for DDMS. These test results yield improved u...
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