Abstract
Vapor phase etching of BP is studied, and the etching rate is shown to increase with both temperature and HCl concentration. The etching rate increases rapidly above 1160°C, probably because BP decomposes into B6 P and P2. Thermodynamical calculation demonstrates that the etching rate remains almost constant with the increase in temperature. Comparison between the experiment and the theory suggests that the etching rate is governed by reaction kinetics.
Sign-in/Register to access full text options 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
