Abstract

In this paper, high-performance conducting Al-doped ZnO (AZO) electrodes were deposited on transparent and flexible muscovite mica substrates. The use of mica as a substrate material makes a van der Waals epitaxy possible, which significantly improves the structural, electrical, and optical properties of deposited AZO single-crystal-like films. AZO/mica retains its low electric resistivity, even after continuous bending of up to 1000 times on account of the unique layered structure of mica. When used as a transparent heater, AZO/mica shows an ultrahigh heating rate (200 °C/s) across large areas, which is a record among flexible transparent heaters.

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