Abstract
This paper is aimed at examining the validity of material constants reported for use in surface acoustic wave (SAW) device simulations. First, based on the full set of material constants calculated by first principle, bulk acoustic wave velocities are calculated for ScxAl1−xN and compared with published experimental results. Then, the effects of the ScxAl1−xN material constants with different Sc content on acoustic characteristics are calculated and the influence of shear vibrations on SAW characteristics are recognized. Then, a series of SAW devices are fabricated on ScxAl1−xN film/Si substrate structure with various Cu and ScAlN thicknesses hCu and hScAlN, respectively, and measured variations of phase velocity V and effective electromechanical coupling factor with these parameters are compared with the calculation. The fairly well-agreed results indicate a reliable set of ScxAl1−xN material constants for SAW device simulations.
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