Abstract

Single-chamber vacuum furnaces have made remarkable progress in the last two decades, particulary with respect to flexibility, cooling speed and temperature uniformity during heating and cooling. Two newly developed highly flexible units are shown. Further increase in the cooling performance in this type of furnace is limited, both by technical and by economical factors. Multi-chamber furnaces with separate cooling chambers allow further technical progress to be made in this field at low operating costs. Theoretical model calculations as well as practical test results are presented.

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