Abstract
The base pressure and outgassing rate of a mild steel chamber were measured and compared to those of a stainless steel chamber. A combined sputter-ion and non-evaporable getter pump with a nominal pumping speed of 490 l/s generated the base pressure of 2.7×10 ?11 mbar in the mild steel chamber and 1.2×10 ?10 mbar in the stainless steel chamber. The rate-of-rise measurements show that the mild steel has an extremely low outgassing rate of 2.6×10 ?13 mbar l s ?1 cm ?2 , which is about one-order of magnitude smaller than the outgassing rate of the stainless steels. Vacuum annealing of the mild steel at 850oC reduced the outgassing rate further to 8.8×10 ?14 mbar l s ?1 cm ?2 , which was comparable to the outgassing rate of a heat treated stainless steel for extreme-high vacuum use.
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