Vacuum-arc-generated macroparticles in the nanometer range

Abstract

Micron and submicron "macroparticles" are produced along with the plasma at vacuum arc cathode spots. Published data refer to the size range 0.2-100 /spl mu/m. The lower limit is determined by the resolution of the equipment used (usually scanning electron microscopes). In the present study we focus on the detection and characterization of nanosize macroparticles ("nanoparticles") using atomic force microscopy and fieid-emission scanning electron microscopy. New information is gathered on material-dependent size distribution functions as well as on the effectiveness of magnetic filtering for nanoparticles.