Abstract

The great interest in the use of diamond-like carbon (DLC) films as a coating material is justified by the superior wear resistance and hardness, chemical inertness, and very low friction coefficients of these coatings. Vacuum arc deposition is well suited to prepare superhard films with high sp3/sp2 ratios. However, the high level of internal stresses originating during growth prevents the deposition of thick films, and their hardness makes it difficult for DLC layers to comply with substrate deformations. In order to overcome these limitations, different approaches are possible. Multilayer structures are one means to maintain the surface mechanical properties of the DLC while relieving the internal stresses. Another possibility is to dope the DLC films in order to reduce the internal stress and to stabilize the desirable sp3 bonds to higher temperatures. At higher doses of dopants, the formation of nanocrystals is possible and the properties of the coatings change drastically. All these approaches were investigated on films prepared by cathodic arc and a synthesis of the results is presented here.

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