Abstract
Ti diffusion in MgO(100) prebombarded by Ar+, Cl+, and Cr+ has been studied by secondary ion mass spectroscopy under conditions for non-steady-state radiation-enhanced diffusion. The Ti diffusion behaviors of these samples are different, although the ballistic behaviors of the implanting ions are similar. For short annealing periods, the Ti diffusion enhancements follow the order Cr+>Ar+>Cl+, while for long annealing periods the order is Cl+>Ar+>Cr+. A model based on a vacancy clustering mechanism during thermal relaxation of the energetic cascade is proposed to explain these trends.
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