Abstract

V2O5 thin films were deposited onto insulating support (either fused silica or alumina) by means of rf reactive sputtering from a metallic vanadium target. Argon-oxygen gas mixtures of different compositions controlled by the flow rates were used for sputtering. X-ray diffraction at glancing incidence (GIXD) and Scanning Electronic Microscopy (SEM) were used for structural and phase characterization. Optical transmittance and reflectance spectra were recorded with a Lambda 19 Perkin-Elmer double spectrophotometer. Thickness of the films was determined from the profilometry. It has been confirmed by GIXD that the deposited films are composed of V2O5 phase. The estimated optical band gap was ca. 2.5 eV. The gas sensing properties of V2O5 thin films were investigated at RT-690 K towards NO2 gas of 0–20 ppm. The results indicated that material exhibited good response and reversibility towards nitrogen dioxide.

Highlights

  • Nitrogen dioxide, NO2 is an extremely toxic gas

  • It has been confirmed by GIXD that the deposited films are composed of V2O5 phase

  • The results indicated that material exhibited good response and reversibility towards nitrogen dioxide

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Summary

Introduction

NO2 is an extremely toxic gas. It is produced by all combustion in air and by industrial processes. Successful development of NO2 gas sensors for commercialization requires achieving three “S”: sensitivity, selectivity and stability. Several metal oxides such as SnO2, ZnO, In2O3 and WO3 were studied extensively for construction semiconductor gas sensors [1,2,3,4]. V2O5, the most stable compound among above 15 known vanadium oxides, is one of good promising NO2 sensor material [6]. It demonstrated high sensitivity and selectivity for ethanol [7], ammonia [8], hydrogen and hydrocarbons [9]. In this paper the effect of gas concentration and operating temperature of V2O5 thin films as NO2 gas sensor was determined

Thin Film Preparation
Morphology and Structural Characterization
Sensing Characterization
Results and Discussion
Conclusions
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