V 형상을 가지는 원자현미경 Cantilever의 정량적 마찰력 교정

Abstract

Atomic force microscopy (AFM) has been used as a tool, not only for imaging surfaces, but also for measuring surface forces and mechanical properties at the nano-scale. Force calibration is crucial for quantitatively measuring the forces that act between the AFM probe of a force sensing cantilever and a sample. In this work, the lateral force calibrations of a V-shaped cantilever were performed using the finite element method, multiple pivot loading, and thermal noise methods. As a result, it was shown that the multiple pivot loading method was appropriate for the lateral force calibration of a V-shaped cantilever. Further, through crosschecking of the abovementioned methods, it was concluded that the thermal noise method could be used for determining the lateral spring constants as long as the lateral deflection sensitivity was accurately determined. To obtain the lateral deflection sensitivity from the sticking portion of the friction loop, the contact stiffness should be taken into account.