Abstract
PMMA (Polymethylmethacrylate) substrate was covered with 1,2,3,5-tetrafluorobenzene by spin-coating. Then the sample was irradiated by a KrF-excimer laser ( λ = 248 nm). After drying out the polymeric substrate, the sample surface was investigated by SEM and EDX indicating some fluorine content at the top of the sample layer. A UV-photochemical fluorination mechanism is proposed.
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