Abstract
Nanocrystalline porous ZnO films have been synthesized by thermal oxidation of amorphous zinc deposits with an anomalously developed surface, which were previously formed using magnetron sputtering. The microstructure, morphology, phase composition, and optical properties of the synthesized oxide films have been studied by X-ray diffraction, scanning electron microscopy, energy-dispersive X-ray spectroscopy, and spectrophotometry. Applicability of the two-stage technique to fabrication of porous ZnO films for UV detectors is demonstrated.
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