Abstract
UV/ozone cleaning was evaluated for cleaning a carbon-contaminated replica grating. Replica optics represent a challenging test of any cleaning process because of the potential for damage to the epoxy layer which can severely degrade the surface figure and finish. A badly contaminated replica grating was divided into three sections for this study. One section was cleaned using a mercury lamp, another section was cleaned using a deuterium lamp, and the third section was left as a control. The results were evaluated using a Ronchi test to determine figure error, a Fotonic sensor to estimate reflectivity, and a microscopic evaluation using a Nomarski objective to look for surface damage. Surface roughness measurements were also performed with a Micromap surface profiler. The results indicated that the surface figure and finish were not significantly degraded, and the surface figure was actually improved compared to the contaminated condition. The visible light reflectivity was fully restored in the areas that were cleaned.
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