Abstract

ABSTRACTUV excimer laser light-induced prenucleation of various surfaces from spin-on films in air is described. Good results were obtained using palladium acetate on substrate materials ranging from ceramics to polymers and even paper. Virtually any surface material can be prenucleated in this way. The Pd-prenucleated planar and curved surfaces can be metallized by a vast variety of metals using electroless plating solutions (Cu, Ni, Au, Pt, Co, Sn, and even alloys). Results are described in detail for copper from a standard electroless solution (Doduco or Shipley). Contact metallization through via holes using this process was aachieved with excellent contact properties.

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