Abstract
AlxGa1−xN-based UV emitters in the form of a graded-index separate confinement heterostructure were grown on 6H-SiC. The devices consist of 100 nm AlxGa1−xN compositionally graded from x = 0.3 to 0 and x = 0 to 0.3 in two sides. Owing to polarization doping from naturally occurring or intentionally incorporated dopants, the two sides are of the doped p- and n-types, giving rise to a p–n junction. The doping level was calculated to be 1018 cm−3 for the p- and n-sides. It was found experimentally that this doping level requires the intentional incorporation of Mg and Si, and those devices show better rectification and stronger electroluminescence emission.
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