Abstract
Liquid-Crystal-On-Silicon (LCOS) Spatial Light Modulator (SLM) is widely used as a programmable adaptive optical element in many laser processing applications with various wavelength light sources. We report UV durable liquid-crystal-on-silicon spatial light modulators for one-shot laser material processing. Newly developed LCOS consists of UV transparent materials and shows a lifetime 480 times longer than the conventional one in 9.7 W/cm2 illumination at 355 nm. We investigated the durability of polymerization inhibitor mixed liquid crystal in order to extend its lifetime.
Highlights
Because conventional laser machining systems with one-way drawing use a 2-axis galvano mirror, they need a relatively long process time for fine large-area processing
It is difficult to create a computer generated hologram (CGH) image with conventional techniques such as thin-film-transistor liquid crystal displays or digital mirror devices (DMD) because they have no ability of optical phase modulation and can only control optical intensity
We report a UV durable LCOS technology for LCOS based UV laser processing
Summary
Because conventional laser machining systems with one-way drawing use a 2-axis galvano mirror, they need a relatively long process time for fine large-area processing. Another mechanical actuator is needed to control depth direction on an optical axis for 3D processing. It is difficult to create a CGH image with conventional techniques such as thin-film-transistor liquid crystal displays or digital mirror devices (DMD) because they have no ability of optical phase modulation and can only control optical intensity. The operational optical bandwidth of LCOS is limited from the visible (VIS) to the near-infrared (NIR) range, owing to an ultraviolet absorption of the constitutional materials; some effective studies for liquid crystal devices under ultraviolet (UV) light have been reported [8,9,10,11]. We report a UV durable LCOS technology for LCOS based UV laser processing
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