Abstract
An ultra violet (UV)-cured glassy material with less than 30 wt% organic residues was fabricated by the fast sol-gel method. The material presents high thermal stability, good optical quality and high adhesive strength. It is suitable for optical bonding and for manufacture of optical elements and micro-structured optical devices. Either soft-lithography or photo-lithography may be used for manufacture of the devices with either, thermal-curing (few hours) or UV-curing (few seconds). In this work we present the technology to fabricate optical elements at scales spanning the sub-micron to centimeter range. This technology enables mass-production of optical elements at low cost.
Highlights
EnglanderApplied Physics Division, Soreq NRC, Yavne 81800, Israel Applied Physics Division, Soreq NRC, Yavne 81800, Israel Applied Physics Division, Soreq NRC, Yavne 81800, Israel
Over the past decade, soft-lithography techniques, such as nano-imprinting lithography [1]-[4] and nano-indentation lithography [5] became well accepted methods for fabrication of nano-devices such as solar filters [1], nano-gratings [2, 5], quantum elements [3] and high order symmetry devices [4]
The sol-gel technology opens an opportunity for material engineering of new classes of ultra violet (UV)-curable materials with improved optical and mechanical properties
Summary
Applied Physics Division, Soreq NRC, Yavne 81800, Israel Applied Physics Division, Soreq NRC, Yavne 81800, Israel Applied Physics Division, Soreq NRC, Yavne 81800, Israel. An ultra violet (UV)-cured glassy material with less than 30 wt% organic residues was fabricated by the fast sol-gel method. The material presents high thermal stability, good optical quality and high adhesive strength. It is suitable for optical bonding and for manufacture of optical elements and micro-structured optical devices. Either soft-lithography or photo-lithography may be used for manufacture of the devices with either, thermal-curing (few hours) or UV-curing (few seconds). In this work we present the technology to fabricate optical elements at scales spanning the sub-micron to centimeter range. This technology enables mass-production of optical elements at low cost.
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