Abstract

In this paper, a design that combines two-port surface acoustic wave (SAW) devices and phononic crystals (PCs) acting as reflected gratings is demonstrated. Finite-difference time-domain method is used to analyze SAWs encountering the PC and optimize the design. A layered ZnO/Si SAW device and a square lattice PC composing of cylindrical holes on silicon were fabricated. With the PC of 15-layer cylinders, experimental insertion loss shows a 7 dB improvement at 212 MHz at central frequency. In addition, the size of gratings is reduced significantly as compared to the traditional gratings with hundreds of metal strips.

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