Abstract
The reproducibility of the pull-in voltage of a single side clamped free-standing beam has been investigated for application as a DC voltage reference. A 2 mm long beam has been fabricated in an epipoly process with, at the tip, poly-poly electrodes extending into the axial direction for electrostatic lateral deflection and a comb-drive operating in the normal lateral beam direction. The DC voltage is applied to the electrodes to cause pull-in and the comb drive actuator is used to restore lateral beam position. The device can be operated in feedback or as a seesaw, by using these two sets of electrodes. The reproducibility of the pull-in voltage appears to be mainly limited by charge injection.
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