Abstract
AbstractDiamond is a material with unique properties to be exploited in various applications. The deposition of diamond thin films on surfaces enables its use in mechanics, electronics and optics, among others. To ensure the quality of crystals is important to control the parameters involved in the deposition process. In this study we used the SOM algorithm for clustering and visualization of the parameters of a reactor for deposition of diamond thin films, which together with scanning electron microscopy and Raman spectroscopy, collaborated in reactor calibration. The results show the importance of temperature in this process.KeywordsSOMhot filament chemical vapour depositiondiamond thin films
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