Abstract
This work demonstrates the availability of using porous silicon as semi-insulating substrate for /spl beta/-SiC high temperature optical sensing devices. An MSM structure was fabricated both on a porous silicon substrate and a conventional silicon substrate, respectively. Experimental results show the optical current ratio can be improved up to 400% at room temperature and 3000% at 200/spl deg/C operating temperature, respectively, with the porous silicon substrate.
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