Using parallel plates capacitor as a volumetric flow rate sensor and direction detection for microfluidic/nanofluidic and extra smaller applications

Abstract

This paper shows how a single parallel plate capacitor can be used to sense volumetric flow rate in micro/nano and smaller scale fluidic conduits and how a double parallel plate capacitor can be used to sense both volumetric flow rate and direction of flow. The concept was developed based on the principles of conservation of energy with some fundamentals of electricity and electromagnetics. Furthermore, the concept was validated experimentally to be accurate. Upon validation the measurement of the sensor was found to be in good agreement with experimental measurement with more accuracy obtained as the supplied voltage for the sensor is increased. Also, the accuracy of the developed concept increases as the characteristic length of the conduit decreases which makes the developed concept even more suitable for smaller scales applications. The concept consumes extremely low power and can be used directly without calibration provided that accurate value for magnetic permittivity of fluid is available. Moreover, the concept can be used for any type of fluid of any conduit shape with easy incorporation onto lab-on-a-chip or MEMS technology. The sensitivity of the sensor is approximately 0.03 A/(m3/s) which is good compared to other sensors.