Using OES to determine electron temperature and density in low-pressure nitrogen and argon plasmas

Abstract

A summary of the methods of electron temperature and electron density measurement in low-pressure nitrogen and argon discharges using optical emission spectroscopy (OES) is given. This paper describes recently developed simple kinetic models for nitrogen and argon discharges and their applications in establishing the relationship between the electron parameters (temperature and density) and the OES line ratios from the discharges. In particular, the assumptions and applicability of these models in different kinds of discharges (capacitively coupled and inductively coupled discharges, discharges with different gas mixtures, etc) are discussed in detail.