Abstract
In this study, polydimethylsiloxane (PDMS) and conductive carbon nanoparticles were combined to fabricate a conductive elastomer PDMS (CPDMS). A high sensitive and flexible CPDMS strain sensor is fabricated by using stamping-process based micro patterning. Compared with conventional sensors, flexible strain sensors are more suitable for medical applications but are usually fabricated by photolithography, which suffers from a large number of steps and difficult mass production. Hence, we fabricated flexible strain sensors using a stamping-process with fewer processes than photolithography. The piezoresistive coefficient and sensitivity of the flexible strain sensor were improved by sensor pattern design and thickness change. Micro-patterning is used to fabricate various CPDMS microstructure patterns. The effect of gauge pattern was evaluated with ANSYS simulations. The piezoresistance of the strain gauges was measured and the gauge factor determined. Experimental results show that the piezoresistive coefficient of CPDMS is approximately linear. Gauge factor measurement results show that the gauge factor of a 140.0 μm thick strain gauge with five grids is the highest.
Highlights
Wearable and skin attachable electronic devices have gained attention in recent years
Was pads of the conductive elastomer PDMS (CPDMS) strain sensor, aluminum wires were fixed with silver glue
CPDMS strain with moremore is greateristhan thethan stretch on the sideside strainsensor sensor with a larger total strain withthe thesame same PDMS
Summary
Wearable and skin attachable electronic devices have gained attention in recent years. A conductive elastomer is a composite containing both flexible material and conductive material, which can be applied to fabricate many kinds of sensors, such as temperature [11], pressure [12,13,14,15], and strain sensors [16,17,18,19,20] These sensors can be used in biomedical applications, such as blood pulse measurement [21] and as electronic skin [22]. The manufacturing required fabricated flexible strain sensors by photolithography with carbonprocedure nanoparticles, carbon undergoing nanotubes, photolithography twice, procedure resulting inrequired a piezoresistive gauge factor of 29.1. Fabricated flexible strain sensors by soft lithography micropatterning, using carbon nanoparticles resulting in a piezoresistive gauge factor of 29.1.
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