Abstract
Due to the rise of biological and MEMS technology in recent years, some micro flow system components have drawn attention and been developed by many investigators. The importance of micro-pumps manufactured is higher than the other part of micro flow system since it is the power source of the entire micro-flow system and responsible for driving working fluid in the microfluidic system. In actual operation, the instability and bad dynamic characteristics of the micro-pump will cause larger fluid flow mobility error, such as transport behavior and response procedures failure, etc., and even damage the microfluidic system. Therefore, to investigate the stability and dynamic characteristics of a micro pump is necessary. The Finite element analysis (FEA), ANSYS Workbench, is employed to analyze the dynamic characteristics of this micro pump, and experiment is also considered in this study.
Highlights
A micro fluid system driven by fluid system, like the human circulatory system, is the driving force source of the entire micro fluid flow system
A diagram of this micro-mechanical piezoelectric pump is In this figure, a thin film, like as the cantilever mechanism, to drive the inlet and outlet valves, and its stability and dynamic characteristics affect the fluid flow accuracy
This paper studies the dynamic characteristics of piezoelectric micro pump
Summary
A micro fluid system driven by fluid system, like the human circulatory system, is the driving force source of the entire micro fluid flow system. Conducting research objective prediction, the micro fluid system future is bound to widespread use of its fluid delivery This system will be through the high-performance micro-pumps provide impetus and accurate delivery flow, so the micro-flow system is worthy to study. A diagram of this micro-mechanical piezoelectric pump is In this figure, a thin film, like as the cantilever mechanism, to drive the inlet and outlet valves, and its stability and dynamic characteristics affect the fluid flow accuracy. A cantilever beam type is employed to simulate the outlet value of a micro pump, as [11]. This outlet valve of a micro pump is selected to study in this work. An experimental analysis is used to identify the dynamic properties accuracy
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