Using a focused ion beam and transmission electron microscopy for local studies on pyrocarbon materials

Abstract

We describe how to use a system with a focused ion beam and transmission electron microscope to studying pyrocarbon and pyroboroncarbon. The advantages and disadvantages of different methods for producing thin foils by means of ion beams are demonstrated. It is shown that using a focused ion beam for the local preparation of samples allows us to find cavities in pyrocarbon materials and to establish the location of monocrystalline particles on their surfaces in pyroboroncarbon.