Use of x-ray emission spectroscopy in the characterization of thin films of aluminum oxides and hydroxides

Abstract

X-ray emission bands (AlK β) of several aluminum oxides and hydroxides have been compared. The bands from the oxyhydroxides and γ-Al 2O 3 are single peaks with some variations in peak position from material to material. However, the band from α-Al 2O 3 is much broader and forms a distinct doublet. The bands from the oxyhydroxides occur at shorter wavelengths than the peaks from α-Al 2O 3. These results may be used to aid in the characterization of thin films (crystalline as well as non-crystalline) on aluminum and aluminum alloys.