Abstract
An instrument has been developed and manufactured to measure the uniformity of the layer thickness deposited inside ceramic vacuum chambers of electron-beam injection devices (kickers). Using this instrument, it is possible to measure this parameter at an aperture size starting with 1 cm and at different aperture geometries. The measurement range is 0.1−100 µm. The necessity of such measurements is substantiated, various types of sensors are described, and results for some vacuum chambers of the injection kickers in the MAX-IV synchrotron radiation facility (Sweden) are presented.
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