Use of particle-in-cell simulations to improve the actinometry technique for determination of absolute atomic oxygen density

Abstract

Actinometry is a non-invasive optical technique that can be used to quantitatively monitor atomic oxygen number densities [O] in gas discharges under certain operating conditions. However, careless application of the technique can lead to erroneous conclusions regarding the behaviour of atomic oxygen in plasma. One limitation on this technique is an accurate knowledge of the various rate constants required, which in turn is hampered by an insufficiently precise knowledge of the electron energy distribution function (EEDF) in the plasma. In this work, particle-in-cell (PIC) simulations are used to generate theoretical EEDFs. To validate a simulation the electron density ne produced by the PIC code is compared with experimental ne values measured using a hairpin probe. The PIC input parameters are adjusted to optimize agreement between the PIC and experimental ne results. This approach should in principle yield an EEDF that more accurately reflects the true EEDF in the plasma. The PIC EEDF is then used to generate rate constants for the actinometry model which should improve the accuracy of the quantitative [O] result for that particular set of plasma conditions. The actinometry [O] results are then compared with [O] results obtained using two-photon absorption laser-induced fluorescence (TALIF) to validate the approach.