Abstract
An experimental study of the use of the optical density of thin films to determine the spatial intensity distribution of metallic vapor is reported. The linearity of the optical density vs film thickness curves of Ag, Au, Cu, Ge, In, and Sn is investigated through the use of thin film wedges. Upper and lower bounds on linearity are given. The lower bound is found to be dependent on deposition rate. Typical distributions for flat molybdenum strip and conical tungsten basket sources are given.
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