Abstract
The merits of a polymer characterization technique, near edge X-ray absorption fine structure (NEXAFS) spectromicroscopy, are demonstrated through the characterization of a multilayer polymer film with partially unknown chemical composition. The combination of chemical speciation through NEXAFS spectroscopy with the high spatial resolution available in X-ray microscopy allows the characterization of polymeric materials not possible with conventional techniques. Analysis of a multilayer with layers as thin as 4 μm has yielded results that differ from those previously obtained by infrared microscopy. Layers below the spatial resolution limit of infrared microscopy were characterized.
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