Use of dielectrophoresis in the fabrication of an atomic force microscope tip with a carbonnanotube: experimental investigation

Abstract

We have developed a method for fabricating a carbon nanotube (CNT) tip for an atomicforce microscope (AFM). To attach a CNT to the tip apex, we used dielectrophoresis(DEP) with a non-uniform electric field. After inserting a drop of CNT solution andapplying an AC electric field between a metal-coated AFM tip and an electrode plate,CNTs were deposited directly on the tip so that they protruded from the tip. We fabricatedtips with individual multi-walled carbon nanotubes and found the experimental conditionsthat gave high fabrication yields. From AFM measurements of the nanoscale anodizedaluminium oxide (AAO) structure, we have shown that a CNT tip assembledusing DEP can produce high-resolution images and have a good wear resistance.